84869022

Of epitaxial deposition machines for semiconductor wafers; of spinners for coating photographic emulsions on semiconductor wafers

84869023

Of ion implanters for doping semiconductor materials; of apparatus for physical deposition by sputtering on semiconductor wafers; of physical deposition apparatus for semiconductor production; of direct write-on-wafer apparatus, step and repeat aligners and other lithography equipment

84869024

Of spraying appliances for etching, stripping or cleaning semiconductor wafers; of apparatus for wet etching, developing, stripping or cleaning semiconductor wafers; of dry-etching patterns on semiconductor materials:Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine tools

84869025

Other

84869026

Of dicing machines for scribing or scoring semiconductor wafers; of lasercutters for cutting tracks in semiconductor production by laser beam; of machines for bending, folding and straightening semiconductor leads:Tool holders and self-opening dieheads; workholders; dividing heads and other special attachments for machine tools

84869027

Other

84869028

Of resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers; of inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers

84869029

Other

84869031

Of machines and apparatus for the manufacture of flat panel displays:Of apparatus for dry etching patterns on flat panel display substrates

84869032

Of apparatus for wet etching, developing, stripping or cleaning flat panel displays:Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine tools

84869033

Other

84869034

Of chemical vapour deposition apparatus for flat panel display production