84864070

Pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates

84864090

Other

848690

Parts and accessories:

84869011

Of machines and apparatus for the manufacture of boules or wafers: Of apparatus for rapid heating of semiconductor wafers

84869012

Of spin dryers for semiconductor wafer processing

84869013

Of machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers

84869014

Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine tools

84869015

Other

84869016

Of grinding, polishing and lapping machines for processing of semiconductor wafers

84869017

Of apparatus for growing or pulling monocrystal semiconductor boules

84869019

Other

84869021

Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits:Of chemical vapour deposition apparatus for semiconductor production