848630

Machines and apparatus for the manufacture of flat panel displays:

84863010

Apparatus for dry etching patterns on flat panel display substrates

84863020

Apparatus for wet etching, developing, stripping or cleaning flat panel displays

84863030

Chemical vapour deposition apparatus for flat panel display production; spinners for coating photosensitive emulsions on flat panel display substrates; apparatus for physical deposition on flat panel display substrates

84863090

Other

848640

Machines and apparatus specified in Note 9 (C) to this Chapter:

84864010

Focused ion beam milling machines to produce or repair masks and reticles for patterns on semiconductor devices

84864020

Die attach apparatus, tape automated bonders, wire bonders and encapsulation equipment for the assembly of semiconductors; automated machines for transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other materials for semiconductor devices

84864030

Moulds for manufacture of semiconductor devices

84864040

Optical stereoscopic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles

84864050

Photomicrographic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles

84864060

Electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles